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AM사의 RF Match 수리 파트
품명 규격 수리기간
ASSY RF MATCH BOX, DPS 0010-00854R 2~3주
ASSY RF MATCH BOX, ETCH 0010-09416R
ASSY RF MATCH BOX, CVD 0010-09750R
ASSY RF MATCH BOX PVD 0010-20524R
HYBRID RF MATCH, MXP+ ,ETCH 0010-12090R
HIGH EFFICIENCY RF MATCH,ETCH,MXP+ 0010-30686R