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Home >기업소개 > 개요 및 연혁 |
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| 1. 설립일 : 2001.06.08 |
| 2. 자본금 : 2억 5천 |
| 3. 사원수 : 20명 |
| 4. 주요사업 |
Field |
Items |
Contents |
Refurbish & Repair |
RF match |
Poly, Oxide, Metal, CVD, HE (Semiconductor,Display) |
Robot |
Vacuum Robots(P5000, Centura, etc.), VME Robot |
Electronics Module |
Lamp Controller Module |
End Point
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AM Product upgrade( HDD,CPU,RAM,ets) |
Monochrometor |
Conunt Controller Module |
Products |
Display Module |
Display Control Module |
Diagnosis system |
Chamber Impedance Diagnosis (CVD, Etch) |
Digital RF match |
Enhanced Digital RF match, DDL Controller for RF Match |
HE-Detector board |
Gas Leakage Controller Module |
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| 5. 연혁 |
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2001. 06 |
ATS Co., Ltd has founded |
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2002. 08 |
Contract with AMK (Refurbish & Repair of RF match & Robot) |
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2003. 10 |
Development of Enhanced Digital RF match |
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2004. 04 |
ISO 2001 Certified by ICR |
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2004. 05 |
Device Maker Consulting
( plasma chamber impedance diagnosis
/ Samsung & Hynix ) |
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2005. 04 |
Establish of ATS’s Research Institute |
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2005. 07 |
Certification of Venture business (R&D)
from Korean Government |
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2006. 01 |
New RF Matcher Developed |
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2006. 05 |
β - test of new Matcher in Korea |
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