Home >기업소개 > 개요 및 연혁
 
1. 설립일 : 2001.06.08
2. 자본금 : 2억 5천
3. 사원수 : 20명
4. 주요사업
Field
Items
Contents
Refurbish & Repair
RF match
Poly, Oxide, Metal, CVD, HE (Semiconductor,Display)
Robot
Vacuum Robots(P5000, Centura, etc.), VME Robot
Electronics Module
Lamp Controller Module
End Point
AM Product upgrade( HDD,CPU,RAM,ets)
Monochrometor
Conunt Controller Module
Products
Display Module
Display Control Module
Diagnosis system
Chamber Impedance Diagnosis (CVD, Etch)
Digital RF match
Enhanced Digital RF match, DDL Controller for RF Match
HE-Detector board
Gas Leakage Controller Module
 
5. 연혁
2001. 06
ATS Co., Ltd has founded
2002. 08
Contract with AMK (Refurbish & Repair of RF match & Robot)
2003. 10
Development of Enhanced Digital RF match
2004. 04
ISO 2001 Certified by ICR
2004. 05
Device Maker Consulting ( plasma chamber impedance diagnosis / Samsung & Hynix )
2005. 04
Establish of ATS’s Research Institute
2005. 07
Certification of Venture business (R&D) from Korean Government
2006. 01
New RF Matcher Developed
2006. 05
β - test of new Matcher in Korea